Products and technologies
Vacuum process equipment
Analytical tools for the gasanalysis and plasma characterization
Vacuum technology components
- Vacuum components and special flange parts, feed troughs, costume made high vacuum- and ultra high vacuum chambers.
- Industrial vacuum process pumps and exhaust management systems.
- GV ion pumps (IGPs), titanium sublimation pumps (TSPs), non-evaporable getters (NEGs) and their controls.
- Laboratory vacuum pumps.
- Vacuum measurement and control systems.